The structure of the vacuum chamber

Vertical front door , Double or cooling tank cooling

dimension of vacuum chamber

900×1000

1

pumping speed

1×105Pa~3×10-3Pa≤15min

limit vacuum

≤8×10-4Pa

system form a complete set

Maintaining the pump

2X-15

1

Mechanical pump

2X-70

1

Diffusion pump

KT-500

1

roots-type pump

ZJP-300

workpiece system

Rotation of the planet forms(8 roating shaft, since the amount)

8

heating methods

Edge installation of stainless steel heating tube

4

ion bombardment

20KW inverter bias

PLS-20KW

1

Arc target

40-200A adjustable

TIG-250

3

magnetron target amount

one plane target or Cylindrical target

2

Magnetron power

30KW IF power

MF-30KW

1

working methods

PLC semi-auto control or PC+PLC auto control

working gas

Ar N2 O2

total power

40KW

compress air

0.4~0.8MPa

water-cooling system

hydraulic pressure/water temperature:≤25°C/≥0.25MPa(user provide for himself)